Steady-State Statistical SputteringModel for Extracting Depth Profiles from Molecular Dynamics Simulations of Dynamic SIMS
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چکیده
Steady-State Statistical SputteringModel for Extracting Depth Profiles from Molecular Dynamics Simulations of Dynamic SIMS Robert J. Paruch, Zbigniew Postawa, Andreas Wucher, and Barbara J. Garrison* Smoluchowski Institute of Physics, Jagiellonian University, Ulica Reymonta 4, 30-059 Krak ow, Poland Faculty of Physics, University of Duisburg-Essen, 47048 Duisburg, Germany Department of Chemistry, 104 Chemistry Building, Penn State University, University Park, Pennsylvania 16802, United States
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